Druck Solutions for the Semiconductor Industry

There are 2 technologies being used in semiconductor mass flow measurement:

• Thermal distribution

• Differential pressure

Both measurements are pressure sensitive. It means a change in applied pressure will affect the mass flow measurement accuracy. Device makers are using independent pressure sensor to compensate mass flow measurement error induced by applied pressure. It seems that current trend is integrating pressure sensor to mass flow meter or mass flow controller. It is claimed as pressure insensitive mass flow meter or mass flow controller.

 

Semiconductor Infrastructure

Lithography

Avoid overheating with pressure sensors

Laser needs N2 gas control and the protection of heating up coming from laser beam should be supported by pressure sensors, such as Druck TERPS8100, a standard pressure sensor to major lithography tool maker companies around the world.

Deposition (CVD)

Controlling Chemical Vaper Deposition

Deposition process, also known as “Chemical Vaper Deposition”, needs controlling many kinds of gases flow rate (AlCl3, WF6 for IC and GaNfor LED), but it’s mostly used as MFC supported by Thermal MFC without pressure sensors.

However, there is the subject kinds of accuracy at high temp in case of thermal MFC without pressure sensor.

ADROIT6200 provides the accuracy needed for this application.

Dry Etching

Solutions that support the process

Dry etching process is the biggest process in semiconductor processes.

It includes different parts, especially pressure MFC in order to keep very accurate gas flow control.

 

Application: MFC for dry etcher

Application: Gas box system for dry etcher

Chemical Mechanical Polishing (CMP)

Zero reset solutions

DPI 802 to CMP application.

And pressure sensor, such as, UNIK5000 or TERPS sensor into the head of polisher.

Semicon pressure variation

The advantage of using pressure sensor in MFC is the response:

With differential pressure measurement, the MFC can achieve the set/targeted mass flow much faster than thermal distribution measurement.

 

In differential pressure MFC, PID control can be used during flow increase ①, steady state ②, and flow decrease ③.

While in thermal distribution MFC, PID control can only be used during flow increase①.

 

 

Helping the Semiconductor Industry Succeed

Explore Druck's Pressure Sensors:

UNIK5000 VCR 3DImage_02

High-performance configurable solution for pressure measurement

UNIK5000 Sensor
one sensor no compromises

A new range of high performance pressure sensing solutions.

ADROIT6200
TERPS USB to VCR

TERPS sensor designed for Semiconductor

TERPS
Druck modules

Customized sensor solutions to your needs.

Modules
Test, Calibration and Pressure Controllers
Pressure controller

Pressure controllers and indicators that measure, test and calibrate pressure.

PACE
DPI802 Pressure Indicator and Loop Calibrator

Druck DPI802

Pressure Indicator and Loop…
PACE Tech Article border2

Best practices on design for automated test systems

Pressure Test System

Download Test & Calibration documentation

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